Determination of the Yield Properties of Thin Films Using Enhanced Coherent Gradient Sensing
نویسنده
چکیده
This paper describes coherent gradient sensing (CGS) as an optical, full-field, real-time, nonintrusive, noncontact technique for measurement of curvature and curvature changes in single-layered and multilayered thin films deposited on substrates. The sensitivity of the basic CGS technique is enhanced using optical fringe multiplication to map curvature in very flat specimens (κ ≤ 0.001 m−1). Subsequently, this curvature measurement technique is applied to the determination of the yield properties of thin films subjected to cyclic thermomechanical loading. KEY WORDS—Thin films, curvature, stress, coherent gradient sensing
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